Blue dragons have a burrow speed of 20. White and Brass dragons have a burrow speed of 30. No mention of whether they leave a usable tunnel.
Ankheg burrow at 20 feet, but only leave a usable tunnel if they cut that speed by half, so you're back to 10 feet.
The Nightcrawler (2d hit dice undead) has a Burrow speed of 60. No mention of tunnel or no tunnel.
Thoqqua (Earth Elemental) burrow at 20 feet and do leave a usable tunnel.
The Umber Hulk has a burrow speed of 20, and can go through solid roc (5 feet).. It can choose to leave behind a usable tunnel.