How about a dwarven shadow-lich, who remains behind to advise the elders of the clan as the "power behind the throne", or as the ultimate protector of the clan? Eventually, the clan dies off (bad advice, eaten by shadow dragons, overrun by goblins/drow/duerger, whatever), leaving the shadowy advisor behind to prosecute his own personal war against the invaders ... along whith his host of shadow-dwarf minions.
Maybe extreme greed pushes the rare dwarf to attain an undead state to continue accumulating wealth, instead of protecting his clan.
I like the earth-elemental take, though. Maybe over time they get slower and slower, and ancient dwarves become sentient rock. As consciousness fades over millenia, the fused bodies of the ancient dwarves hardens into an even harder form ... eventually mined as adamantine.